- Title
- Tilted beam piezoresistive displacement sensor: design, modeling, and characterization
- Creator
- Maroufi, Mohammad; Bazaei, Ali; Mohammadi, Ali; Moheimani, S. O. Reza
- Relation
- Journal of Microelectromechanical Systems Vol. 24, Issue 5, p. 1594-1605
- Publisher Link
- http://dx.doi.org/10.1109/JMEMS.2015.2426180
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- journal article
- Date
- 2015
- Description
- We present a comprehensive study of the design, modeling, and characterization of an on-chip piezoresistive displacement sensor. The design is based on the bulk piezoresistivity of tilted clamped-guided beams without the need for additional steps to generate doped regions. The sensor is implemented in a one-degree-of-freedom microelectromechanical system (MEMS) nanopositioner, where the beams also function as the suspension system. A standard MEMS fabrication process is used to realize the device on single-crystalline silicon as the structural material. The beams are oppositely tilted to develop tensile and compressive axial forces during stage movement, creating a differential sensing feature. An analytical approach is proposed for modeling and design of the tilted clamped-guided beams. The linearity of the sensor in the differential configuration is investigated analytically. The static, dynamic, and noise characteristics of the sensor are presented, followed by a model-based investigation of the measured dynamic feedthrough.
- Subject
- piezoresistive displacement sensor; MEMS nanopositioner; tilted clamped-guided beam; buckling; negative stiffness
- Identifier
- http://hdl.handle.net/1959.13/1340371
- Identifier
- uon:28463
- Identifier
- ISSN:1057-7157
- Language
- eng
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